Document Type and Number:
Japanese Patent JPS54122765
Kind Code:
U
Application Number:
JP1843578U
Publication Date:
August 28, 1979
Filing Date:
February 17, 1978
Export Citation:
International Classes:
B28D5/00; B26F3/00; H01L21/301; H01L21/302; H01L21/461; (IPC1-7): H01L21/302; B26F3/00; H01L21/461