Document Type and Number:
Japanese Patent JPS5414168
Kind Code:
U
Application Number:
JP8544377U
Publication Date:
January 30, 1979
Filing Date:
June 30, 1977
Export Citation:
International Classes:
H01L21/673; H01L21/20; H01L21/205; H01L21/22; H01L21/31; H01L21/68; (IPC1-7): H01L21/31; H01L21/20; H01L21/22; H01L21/68