Document Type and Number:
Japanese Patent JPS54143163
Kind Code:
U
Application Number:
JP3954478U
Publication Date:
October 04, 1979
Filing Date:
March 27, 1978
Export Citation:
International Classes:
F27B5/00; H01L21/22; H01L21/324; (IPC1-7): H01L21/22; F27B5/00; H01L21/324