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Patent Searching and Data


Document Type and Number:
Japanese Patent JPS54151669
Kind Code:
U
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Application Number:
JP4673278U
Publication Date:
October 22, 1979
Filing Date:
April 10, 1978
Export Citation:
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International Classes:
F23Q3/00; H01L41/02; H01L41/113; H02N2/00; (IPC1-7): F23Q3/00; H01L41/02