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Document Type and Number:
Japanese Patent JPS5423560
Kind Code:
U
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Application Number:
JP9607977U
Publication Date:
February 16, 1979
Filing Date:
July 18, 1977
Export Citation:
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International Classes:
C30B23/00; C23C14/24; H01H50/00; H01L21/203; H01L21/22; H01L21/68; (IPC1-7): H01L21/203; B01J17/30; C23C13/12; H01H50/00; H01L21/68



 
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