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Patent Searching and Data


Document Type and Number:
Japanese Patent JPS5431350
Kind Code:
B1
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Application Number:
JP456070A
Publication Date:
October 06, 1979
Filing Date:
January 19, 1970
Export Citation:
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International Classes:
H01L21/306; H01L21/302; H01L21/331; H01L29/72; H01L29/73; (IPC1-7): H01L29/72; H01L21/302



 
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