Document Type and Number:
Japanese Patent JPS5438853
Kind Code:
Y2
Application Number:
JP4062476U
Publication Date:
November 17, 1979
Filing Date:
April 01, 1976
Export Citation:
International Classes:
C30B19/06; H01L21/208; H01L33/30; (IPC1-7): H01L21/208; B01J17/06; H01L33/00