Document Type and Number:
Japanese Patent JPS55126177
Kind Code:
U
Application Number:
JP2582879U
Publication Date:
September 06, 1980
Filing Date:
February 28, 1979
Export Citation:
International Classes:
F25D11/00; F25B21/02; F25D9/00; H01L23/34; H01L23/38; (IPC1-7): F25D9/00; H01L23/34