Document Type and Number:
Japanese Patent JPS5515316
Kind Code:
Y2
Application Number:
JP13849975U
Publication Date:
April 09, 1980
Filing Date:
October 09, 1975
Export Citation:
International Classes:
C30B19/06; H01L21/208; H01L21/368; H01L33/30; (IPC1-7): H01L21/208; C30B19/06; H01L33/00