Document Type and Number:
Japanese Patent JPS55179064
Kind Code:
U
More Like This:
| JPS5923534 | MANUFACTURE OF SEMICONDUCTOR DEVICE |
Application Number:
JP7887079U
Publication Date:
December 23, 1980
Filing Date:
June 08, 1979
Export Citation:
International Classes:
H01L21/52; H01L21/58; H01L23/04; H01L23/48; H01L29/74; (IPC1-7): H01L23/48; H01L29/44; H01L29/74