Document Type and Number:
Japanese Patent JPS5521476
Kind Code:
Y2
Application Number:
JP15658475U
Publication Date:
May 23, 1980
Filing Date:
November 18, 1975
Export Citation:
International Classes:
G01L21/32; G01L21/30; H01J1/46; H01J41/04; (IPC1-7): H01J41/04; H01J1/46