Document Type and Number:
Japanese Patent JPS5527255
Kind Code:
Y2
Application Number:
JP6171374U
Publication Date:
June 30, 1980
Filing Date:
May 29, 1974
Export Citation:
International Classes:
G11C11/411; G06F13/00; G11C11/40; H01L21/822; H01L21/8222; H01L27/04; H01L27/06; H01L27/10; (IPC1-7): H01L27/04; G11C11/40; H01L27/10