Document Type and Number:
Japanese Patent JPS5529542
Kind Code:
U
Application Number:
JP11277878U
Publication Date:
February 26, 1980
Filing Date:
August 16, 1978
Export Citation:
International Classes:
H01L21/66; H01L21/60; (IPC1-7): H01L21/60; H01L21/66
Domestic Patent References:
| JP45021534A |