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Document Type and Number:
Japanese Patent JPS5543439
Kind Code:
B2
More Like This:
JP2759298INDUSTRIAL APPLICABILITY: Method for forming a thin film
JPH062638The production method of a semiconductor crystal
Application Number:
JP583876A
Publication Date:
November 06, 1980
Filing Date:
January 23, 1976
Export Citation:
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International Classes:
C30B19/00; C30B29/40; H01L21/208



 
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