Document Type and Number:
Japanese Patent JPS5550998
Kind Code:
Y2
Application Number:
JP16314275U
Publication Date:
November 27, 1980
Filing Date:
December 03, 1975
Export Citation:
International Classes:
H01L21/683; H01L21/301; H01L21/68; H01L21/78; (IPC1-7): H01L21/78