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Document Type and Number:
Japanese Patent JPS5552679
Kind Code:
Y2
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Application Number:
JP12268076U
Publication Date:
December 06, 1980
Filing Date:
September 10, 1976
Export Citation:
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International Classes:
H01L23/50; H01L21/56; H01L21/60; H01L23/02; (IPC1-7): H01L21/56



 
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