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Document Type and Number:
Japanese Patent JPS55904
Kind Code:
Y2
More Like This:
JPS5776432MEASURING DEVICE FOR DEGREE OF VACUUM
JP2807059[Title of Invention] Measured value detector for measuring vacuum degree
JP5579038A vacuum processor provided with the cold cathode ionization gauge and the cold cathode ionization gauge, an electric discharge start auxiliary electrode used for the cold cathode ionization gauge, a pressure measuring method using the cold cathode ionization gauge
Application Number:
JP10356474U
Publication Date:
January 11, 1980
Filing Date:
August 29, 1974
Export Citation:
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International Classes:
G01L21/34; G01L21/00; H01H33/66; (IPC1-7): G01L21/34; H01H33/66



 
Next Patent: JPH055905