Document Type and Number:
Japanese Patent JPS56135152
Kind Code:
U
Application Number:
JP3182580U
Publication Date:
October 13, 1981
Filing Date:
March 13, 1980
Export Citation:
International Classes:
G01N23/06; G01B15/02; G01L21/26; G01L21/30; G01N23/00; G01N23/02; G01N23/225; H01J33/00; H01J47/08; (IPC1-7): G01N23/02; G01B15/02; G01L21/26; G01N23/00; H01J33/00; H01J47/08