Document Type and Number:
Japanese Patent JPS5623675
Kind Code:
U
Application Number:
JP10416279U
Publication Date:
March 03, 1981
Filing Date:
July 30, 1979
Export Citation:
International Classes:
G01F23/24; C23F13/00; G01F23/00; G01N27/26; G01N27/30; (IPC1-7): C23F13/00; G01F23/00; G01N27/26