Document Type and Number:
Japanese Patent JPS5628156
Kind Code:
U
Application Number:
JP11090879U
Publication Date:
March 16, 1981
Filing Date:
August 11, 1979
Export Citation:
International Classes:
G01L21/32; H01J5/02; H01J41/02; (IPC1-7): H01J41/02; G01L21/32; H01J5/02