Document Type and Number:
Japanese Patent JPS5637466
Kind Code:
U
Application Number:
JP12073479U
Publication Date:
April 09, 1981
Filing Date:
August 31, 1979
Export Citation:
International Classes:
G01L21/32; H01J5/02; H01J37/18; H01J41/04; (IPC1-7): H01J41/04; G01L21/32; H01J5/02
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