Document Type and Number:
Japanese Patent JPS5646265
Kind Code:
U
Application Number:
JP12878679U
Publication Date:
April 24, 1981
Filing Date:
September 17, 1979
Export Citation:
International Classes:
H01L23/50; H01L21/56; H01L23/48; (IPC1-7): H01L23/48; H01L23/30
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