Document Type and Number:
Japanese Patent JPS5646912
Kind Code:
Y2
Application Number:
JP823175U
Publication Date:
November 02, 1981
Filing Date:
January 16, 1975
Export Citation:
International Classes:
B24B37/12; B24B37/20; B24B37/24; B24D9/08; C23F1/08; H01L21/02; H01L21/304; (IPC1-7): B24B37/04; B24D9/08