Document Type and Number:
Japanese Patent JPS5651227
Kind Code:
B2
Abstract:
A method and apparatus for recirculation of atmosphere in a vacuum furnace which comprises a recirculation loop in which there is a low pressure line from the furnace chamber leading to a recirculation pump which pumps the recycled gas at a higher pressure to a high pressure line back into the furnace chamber. A means to analyze the furnace atmosphere is in communication with the high pressure line and signals its measurements of the atmosphere analysis to a valve on an enriching line. The enriching line passes enriched gas into either the high pressure line or the furnace chamber as the valve opens or closes. A means is provided to withdraw the gas from the furnace chamber in order to maintain the desired furnace chamber pressure as enriching gas is added.
Application Number:
JP9803079A
Publication Date:
December 03, 1981
Filing Date:
July 31, 1979
Export Citation:
International Classes:
C23C8/22; C21D1/767; C21D1/773; F27B5/16; F27D7/06; F27D19/00