Document Type and Number:
Japanese Patent JPS5656667
Kind Code:
U
Application Number:
JP13705579U
Publication Date:
May 16, 1981
Filing Date:
October 02, 1979
Export Citation:
International Classes:
H01L23/12; H01L21/52; H01L27/02; (IPC1-7): H01L27/02; H01L23/12