Document Type and Number:
Japanese Patent JPS5678244
Kind Code:
U
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Application Number:
JP15518779U
Publication Date:
June 25, 1981
Filing Date:
November 07, 1979
Export Citation:
International Classes:
B25B7/02; B25B9/02; H01L21/02; H01L21/677; H01L21/68; (IPC1-7): H01L21/02; B25B9/02; H01L21/68