Document Type and Number:
Japanese Patent JPS57146338
Kind Code:
U
Application Number:
JP3246381U
Publication Date:
September 14, 1982
Filing Date:
March 09, 1981
Export Citation:
International Classes:
B26B27/00; B26B13/00; H01L21/60; (IPC1-7): H01L21/60; B26B13/00