Document Type and Number:
Japanese Patent JPS57161856
Kind Code:
U
Application Number:
JP4876081U
Publication Date:
October 12, 1982
Filing Date:
April 04, 1981
Export Citation:
International Classes:
H01J37/304; H01J37/317; H01L21/265; (IPC1-7): H01J37/317; H01J37/304; H01L21/265
Domestic Patent References:
| JPS55160427A | 1980-12-13 |