Document Type and Number:
Japanese Patent JPS57181056
Kind Code:
U
Application Number:
JP6773881U
Publication Date:
November 17, 1982
Filing Date:
May 11, 1981
Export Citation:
International Classes:
H01L31/12; (IPC1-7): H01L31/12
Domestic Patent References:
| JPS53129505A | 1978-11-11 | |||
| JPS5429595A | 1979-03-05 |