Document Type and Number:
Japanese Patent JPS5744181
Kind Code:
U
Application Number:
JP11743280U
Publication Date:
March 11, 1982
Filing Date:
August 21, 1980
Export Citation:
International Classes:
C25D17/08; C25D17/06; H01L21/60; H01L23/48; H01L23/50; (IPC1-7): C25D17/06; H01L21/60; H01L23/48