Document Type and Number:
Japanese Patent JPS5748160
Kind Code:
Y2
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| WO/2007/107735 | MEMS DEVICE |
Application Number:
JP3403673U
Publication Date:
October 22, 1982
Filing Date:
March 20, 1973
Export Citation:
International Classes:
H04R19/00; H04R19/01; (IPC1-7): H04R19/01