Document Type and Number:
Japanese Patent JPS5757443
Kind Code:
U
Application Number:
JP10465981U
Publication Date:
April 05, 1982
Filing Date:
July 16, 1981
Export Citation:
International Classes:
G03F9/00; G03F1/00; G03F1/40; G03F1/72; H01L21/027; H01L21/30; (IPC1-7): G03F9/00; H01L21/30
Domestic Patent References:
| JPS4879978A | 1973-10-26 | |||
| JPS4934843A | 1974-03-30 | |||
| JPS4818503A |