Document Type and Number:
Japanese Patent JPS5758794
Kind Code:
B2
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Inventors:
UENO SHINSUKE
YUASA TSUNAO
MORIHISA JUZO
NISHIDA KATSUHIKO
SAKUMA ISAMU
YUASA TSUNAO
MORIHISA JUZO
NISHIDA KATSUHIKO
SAKUMA ISAMU
Application Number:
JP3336675A
Publication Date:
December 11, 1982
Filing Date:
March 19, 1975
Export Citation:
Assignee:
NIPPON ELECTRIC CO
International Classes:
H01L21/302; H01L21/027; H01L21/26; H01L21/265; H01L21/30; H01S5/00