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Patent Searching and Data


Document Type and Number:
Japanese Patent JPS579574
Kind Code:
B2
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Application Number:
JP6087676A
Publication Date:
February 22, 1982
Filing Date:
May 25, 1976
Export Citation:
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International Classes:
H01L21/027; C08F2/00; C08F2/48; C08F30/00; C08F30/02; C08F261/00; C08F261/04; C08F291/00; C08L29/00; C08L29/04; C08L33/00; C08L33/02; G03F7/038; H01L21/312



 
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