Title:
SPINNER
Document Type and Number:
Japanese Patent JPS58111320
Kind Code:
A
Abstract:
PURPOSE:To increase the substrate-supporting force of a spinner, by vertically providing guide pins on support parts of the spinner, and clamping the peripheral sides of a mask substrate in a point-contact manner, as well as making the apexes of the guide pins lower than the upper surface of the substrate. CONSTITUTION:A spinner 10 is installed inside a housing 11 for applying a photoresist and is connected to a rotary output shaft 12a of a motor 12 so as to be horizontally rotated at high speed. The spinner 10 has four arms 14 integrally formed therewith and projected in the horizontal four directions, respectively. The ends of the arms 14 are upwardly bent, and the upper ends thereof form support plates 15a-15d, respectively. Guide pins 16a-16f are vertically provided on the support plates, one for each of the plates 15b, 15d, while two for each of the plates 15a, 15c. These guide pins can abut on the respective peripheral sides of a mask substrate M in the four corners to restrict the substrate M horizontally. In addition, the guide pins are formed so as to be shorter than the thickness of the substrate M.
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Inventors:
IWAMA SATORU
Application Number:
JP20941981A
Publication Date:
July 02, 1983
Filing Date:
December 25, 1981
Export Citation:
Assignee:
HITACHI LTD
HITACHI ELECTR ENG
HITACHI ELECTR ENG
International Classes:
H01L21/027; G03F7/16; (IPC1-7): H01L21/30
Domestic Patent References:
| JP55071547B | ||||
| JPS508733A | 1975-01-29 | |||
| JPS5043564U | 1975-05-01 | |||
| JP57123674B |
Attorney, Agent or Firm:
Katsuo Ogawa