Title:
MANUFACTURE OF JOSEPHSON JUNCTION ELEMENT
Document Type and Number:
Japanese Patent JPS58119685
Kind Code:
A
Abstract:
PURPOSE:To manufacture the Josephson junction element precisely with a high yield rate, by connecting a first vacuum chamber and a second vacuum chamber through an air lock valve, and always keeping the second vacuum chamber at a high vacuum state. CONSTITUTION:A first holder 203 is provided in the first vacuum chamber 201, connected to an RF power source 202, and insulated from the vacuum chamber 201. A substrate holder 205, to which substrates 204 are attached, is fixed to the first holder 203 by first pawls 206. Then the air in the first vacuum chamber 201 is evacuated by a first vacuum pump 207. Oxygen gas or mixed gas including oxygen gas are introduced into the first vacuum chamber 201 by an oxygen gas supplying device 8, and an oxide film is formed on a first electrode. Then the air lock valve 210, which shuts the first vacuum chamber 201 and the second vacuum chamber 209 in a vacuum state, is opened, and the substrate holder 205 is sent to the second vacuum chamber 209 by a conveying mechanism 212. The evacuation of the air from the chamber 209 is continued by a second vacuum pump 211. When a specified vacuum degree is attained, a second super conductor such as niobium alloy for forming a second electrode is evaporated in the vacuum from an evaporation source 215, and the Josephson junction is formed.
Inventors:
YOSHIDA TAKUKATSU
Application Number:
JP260782A
Publication Date:
July 16, 1983
Filing Date:
January 11, 1982
Export Citation:
Assignee:
NIPPON ELECTRIC CO
International Classes:
H01L39/24; H01L39/04; (IPC1-7): H01L39/24
Attorney, Agent or Firm:
Uchihara Shin
Previous Patent: JPS58119684
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