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Title:
CHEMICAL PLATING APPARATUS
Document Type and Number:
Japanese Patent JPS58123865
Kind Code:
A
Abstract:

PURPOSE: To stabilize a plating soln. when components which are lacking for the soln. are injected into the soln., by mixing the components with the soln. by agitation to prevent the formation of insoluble hydroxide.

CONSTITUTION: The titled apparatus is composed of a plating vessel 1 holding a plating soln. consisting of a plurality of liq. components, a section for detecting and controlling the liq. components in the vessel 1, a section for feeding a plurality of liq. components to be replenished in accordance with the instruction of the controlling section, and a mixer 5 for mixing the replenishers 7, 8, 9, 10 fed from the feeding section. The replenishers 7W10 are rapidly mixed with a plating soln. 12 circulated by a circulating pump 3, so formed insoluble hydroxide is dissolved to stabilize the plating soln.


Inventors:
MUTOU TSUNEFUMI
OKA HITOSHI
MIYAZAWA OSAMU
Application Number:
JP598882A
Publication Date:
July 23, 1983
Filing Date:
January 20, 1982
Export Citation:
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Assignee:
HITACHI LTD
International Classes:
H05K3/42; C23C18/16; C23C18/31; C23C18/40; H05K3/18; (IPC1-7): C23C3/02; H05K3/18; H05K3/42
Attorney, Agent or Firm:
Toshiyuki Usuda



 
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