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Title:
SCANNING TYPE ELECTRON MICROSCOPE
Document Type and Number:
Japanese Patent JPS58133750
Kind Code:
A
Abstract:

PURPOSE: To improve operative conditions by intensifying a plurality of condition setting up, for instance, electron ray acceleration voltage, working distance and a data number into one set of input means in common use.

CONSTITUTION: A figure showing one example of a related part of operation panel, when four kinds of condition setting up such as acceleration voltage, working distance, a data number and scanning time of photographing are intensified into one set of keyboard and the figure showing one example of the related part of the operation panel, when said matters are constituted by individual switches are here illustrated. In said illustration, 2 denotes a group of switches performing voltage setting up in 10KV up to 0W50K, 3 denotes a switch, which sets up in 1KV up to 1W9KV, 4 and 5 denote switches setting up working distance and scanning time of photographing and 6 denotes a switch to set up a data number of five figures (for printing on a photo). The keyboard has a function of intensifying said switches.


Inventors:
YAMADA OSAMU
Application Number:
JP1491282A
Publication Date:
August 09, 1983
Filing Date:
February 03, 1982
Export Citation:
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Assignee:
HITACHI LTD
International Classes:
H01J37/28; (IPC1-7): H01J37/28
Attorney, Agent or Firm:
Katsuo Ogawa



 
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