Title:
【考案の名称】ウエハ-の位置決め装置
Document Type and Number:
Japanese Patent JPS58138339
Kind Code:
U
More Like This:
Inventors:
Kentoshi Nagata
Tsutomu Mizumura
Tsutomu Mizumura
Application Number:
JP3490182U
Publication Date:
September 17, 1983
Filing Date:
March 12, 1982
Export Citation:
International Classes:
H01L21/68; H01L21/67; (IPC1-7): H01L21/68
Domestic Patent References:
| JPS5392667A | 1978-08-14 |