【考案の名称】電離真空計制御装置

Title:

【考案の名称】電離真空計制御装置

Document Type and Number:

Japanese Patent JPS58145534

Kind Code:

U

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Inventors:

Akitsu Okura
Naotake Saito

Application Number:

JP4174382U

Publication Date:

September 30, 1983

Filing Date:

March 26, 1982

Export Citation:

International Classes:

G01L21/32; G08C25/00; (IPC1-7): G01L21/32; G08C25/00

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