Title:
AMORPHOUS SOLAR BATTERY AND MANUFACTURE THEREOF
Document Type and Number:
Japanese Patent JPS58147178
Kind Code:
A
Abstract:
PURPOSE:To enhance the open terminal voltage of an amporphous solar battery having an MIS structure by forming an I layer with amorphous silicon layer accumulated by the decomposition of disilanes. CONSTITUTION:A substrate 4 is introduced into an RF stable coupling type plasma generator, a mixture gas of PH3:SiH4=1:1,000 is introduced to the generator, a glow discharge is performed to form an N type a-Si layer 33, a mixture gas of disilanes:H2=1:1 is introduced, a glow discharge is performed, thereby forming an I type a-Si layer 32. A mixture gas of B2H6:SiH4=1:100 is introduced, a glow discharge is performed, thereby forming a P type a-Si layer 31. A mixture gas of disilanes:H2=1:100 is then introduced, a glow discharge is performed, an a-Si layer is accumulated as an I layer 2, the substrate is moved to a sputtering device, platinum is sputtered to form an M layer 1. An indium tin ixide film is formed by vacuum deposition as an electrode 5.
Inventors:
FUKUDA NOBUHIRO
OOHASHI YUTAKA
OOSUGA HIROSHI
OOHASHI YUTAKA
OOSUGA HIROSHI
Application Number:
JP2886682A
Publication Date:
September 01, 1983
Filing Date:
February 26, 1982
Export Citation:
Assignee:
MITSUI TOATSU CHEMICALS
International Classes:
H01L31/04; C23C16/24; H01L31/20; (IPC1-7): H01L31/04
Attorney, Agent or Firm:
Wakabayashi Tadashi