Title:
【考案の名称】ウエハ静電チヤツク
Document Type and Number:
Japanese Patent JPS58148936
Kind Code:
U
Inventors:
Hirosuke Oshio
Application Number:
JP4487182U
Publication Date:
October 06, 1983
Filing Date:
March 31, 1982
Export Citation:
International Classes:
H01L21/30; H01L21/027; H01L21/68; H01L21/683; (IPC1-7): H01L21/68; H01L21/30
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