Title:
ELECTRON BEAM DRAWING METHOD
Document Type and Number:
Japanese Patent JPS58153329
Kind Code:
A
Abstract:
PURPOSE:To shorten the drawing time of an electron beam by dividing a figure having sides not parallel to the side of a rectangular electron beam into rectangles, scanning it with large rectangular beam, and dividing the periphery into triangular figures, and scanning the side perpendicular to the shortest side in parallel with the finely shaped short side of the rectangular beam. CONSTITUTION:Perpendicular two sides x=50mum, y=100mum of a figure 1 are respectively divided into sides less than the maximum width of 12.5mum of the electron beams into 16 rectangles 7 and 8 triangular shapes 3. A beam of 12.5mum wide is once emitted to each rectangle 7, a beam 5 shaped in a width 5 of 0.5mum is emitted 10<3> times at a pitch 6 (0.05mum) of 1/10 of the width 5 parallel to the short side b in each shape 3. However, the emitting time is set to 1/10 of the case of the rectangle 7. According to this method, the required time of drawing the triangular shape can be largely shortened, and the dimensional accuracy of drawing is not lowered.
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Inventors:
HASEGAWA SHINYA
SUZUKI KATSUMI
SUZUKI KATSUMI
Application Number:
JP3615482A
Publication Date:
September 12, 1983
Filing Date:
March 08, 1982
Export Citation:
Assignee:
NIPPON ELECTRIC CO
International Classes:
H01L21/027; H01J37/317; (IPC1-7): H01L21/30
Attorney, Agent or Firm:
Uchihara Shin