Title:
【発明の名称】半導体シリコンの引上法
Document Type and Number:
Japanese Patent JPS5815477
Kind Code:
B2
Inventors:
OSADA KIMIO
KOBAYASHI KAZUO
KOBAYASHI KAZUO
Application Number:
JP10511177A
Publication Date:
March 25, 1983
Filing Date:
August 31, 1977
Export Citation:
Assignee:
OSAKA TITANIUM
International Classes:
C30B15/00; C30B29/06; H01L21/208; (IPC1-7): C30B29/06; C30B15/00; H01L21/18