Title:
【考案の名称】シリコン単結晶製造装置
Document Type and Number:
Japanese Patent JPS58155370
Kind Code:
U
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Inventors:
Hiraishi Yoshinobu
Application Number:
JP5072982U
Publication Date:
October 17, 1983
Filing Date:
April 09, 1982
Export Citation:
International Classes:
C30B15/00; C30B15/20; C30B29/06; (IPC1-7): C30B15/20; C30B29/06