Title:
【考案の名称】基板保持装置
Document Type and Number:
Japanese Patent JPS58155895
Kind Code:
U
Inventors:
Kiyoto Ishida
Application Number:
JP5310782U
Publication Date:
October 18, 1983
Filing Date:
April 14, 1982
Export Citation:
International Classes:
H05K7/14; H05K1/00; H05K7/18; (IPC1-7): H05K7/18; H05K1/00; H05K7/14