Title:
【発明の名称】シツリヨウブンセキソウチ
Document Type and Number:
Japanese Patent JPS5815732
Kind Code:
B2
Inventors:
DOI HIROSHI
SAKUMICHI KUNYUKI
SAKUMICHI KUNYUKI
Application Number:
JP4457074A
Publication Date:
March 28, 1983
Filing Date:
April 22, 1974
Export Citation:
Assignee:
HITACHI LTD
International Classes:
G01N23/225; G01N27/62; H01J37/252; H01J49/26; H01J49/28; (IPC1-7): G01N27/62; H01J49/26
Attorney, Agent or Firm:
Toshiyuki Usuda