Title:
【考案の名称】光学式形状測定装置
Document Type and Number:
Japanese Patent JPS58160306
Kind Code:
U
Inventors:
Hashimoto Susumu
Suzuki Etsu
Suzuki Etsu
Application Number:
JP5714082U
Publication Date:
October 25, 1983
Filing Date:
April 20, 1982
Export Citation:
International Classes:
G01B11/00; G01B11/24; (IPC1-7): G01B11/00; G01B11/24