Title:
MOISTURE SENSOR AND METHOD OF PRODUCING SAME
Document Type and Number:
Japanese Patent JPS58165313
Kind Code:
A
Abstract:
A moisture sensor comprises a moisture-sensitive layer formed from the oxide of highly resistive porous low density tantalum on a moisture-insensitive substrate. Between the substrate and the moisture-sensitive tantalum oxide layer there is a base electrode of an anodically oxidizable metal, preferably tantalum, of a density higher than the density of the low density tantalum from which the tantalum oxide layer is formed. A covering electrode partially covering the tantalum oxide layer has windows through which the water vapor containing medium can penetrate into the moisture-sensitive tantalum oxide layer. The inactive regions of the tantalum oxide layer disposed below the windows are removed to increase the rate of response.
Inventors:
ERUNSUTO RIYUUDAA
TORAUGOTSUTO KARUFUASU
KURISUCHIAN BORUKUBUARUTO
TORAUGOTSUTO KARUFUASU
KURISUCHIAN BORUKUBUARUTO
Application Number:
JP22718982A
Publication Date:
September 30, 1983
Filing Date:
December 27, 1982
Export Citation:
Assignee:
ENDRESS HAUSER GMBH CO
International Classes:
H01C7/00; G01N27/12; G01N27/22; H01G7/00; (IPC1-7): G01N27/22; H01C7/00; H01G7/00
Domestic Patent References:
| JPS5212497A | 1977-01-31 |
Attorney, Agent or Firm:
Toshio Yano