Title:
【考案の名称】ホリゾンタルオ-ガにおけるタ-ゲツト装置
Document Type and Number:
Japanese Patent JPS58175435
Kind Code:
U
Inventors:
Noriaki Matsuda
Tsuneyoshi Tokita
Tsuneyoshi Tokita
Application Number:
JP7149382U
Publication Date:
November 24, 1983
Filing Date:
May 18, 1982
Export Citation:
International Classes:
H01L33/00; E21D9/06; E21D9/093; G01C15/06; G01L15/00; (IPC1-7): G01L15/00; E21D9/06; H01L33/00
Domestic Patent References:
| JPS5720717U | 1982-02-03 | |||
| JPS485291A |